Typical Detection Limits for ESS Systems

We are often asked about detection limits, here are some tables of typical, frequently requested analytes..

 

                                                                               

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General Gas Types:

Capillary Inlet

Gas Name

Argon

<1ppm

CO

<1ppm

CO2

<1ppm

Helium

<100ppb

Hydrogen

<1ppm

Krypton

<2ppb

Methane

<1ppm

Nitrogen

<1ppm

Oxygen

<1ppm

Xenon

<2ppb

  

Semiconductor Gases:

Gas Name

Capillary Inlet

AR

<1ppm

AsH3

<1ppm

C2F6

<1ppm

C3F8

<1ppm

CF4

<1ppm

CHF3

<1ppm

CO2

<1ppm

CO2

<1ppm

F2

<1ppm

H2O

<1ppm

HF

<1ppm

NF3

<1ppm

Nitrogen

<1ppm

PH3

<1ppm

SF6

<1ppm

SIF4

<1ppm

SIH4

<1ppm

WF3

<1ppm

WF6

<1ppm

   Process  Gases:

Gas Name

Capillary Inlet

Membrane Inlet

1,3,Butadiene

<1ppm

<50ppb

Acrylic Acid

<1ppm

<50ppb

Benzene

<1ppm

<1ppb

Butene

<1ppm

<1ppm

Chlorine

<1ppm

<1ppm

CO

<1ppm

<1ppm

CO2

<1ppm

<1ppm

COS

<5ppm

<0.01ppb

Cyclohexane

<5ppm

<1ppb

Ethylene

<5ppm

<5ppm

Ethylene Oxide

<5ppm

<5ppm

H2SO4

<5ppm

<5ppm

HCL

<5ppm

<5ppm

Hexane

<1ppm

<1ppb

HF

<10ppm

<10ppm

Hydrogen

<1ppm

<1ppm

Methane

<1ppm

<1ppm

NH3

<50ppm

<50ppm

Propene

<1ppm

<1ppm

SO2

<1ppm

<1ppm

Styrene

<1ppm

<1ppb

Toluene

<1ppm

<1ppb

Vinyl Acetate

<1ppm

<1ppb

Xylene

<1ppm

<1ppb

 

Atmospheric Monitoring Gases:

Gas Name

Membrane Inlet

TD/MS Link

1,3, Butadiene

<50ppb

<0.01ppb

Acetone

<50ppb

<0.01ppb

Acrylic Acid

<50ppb

<0.01ppb

Benzene

<1ppb

<0.01ppb

Chlorine

<1ppm

N/A

DMS

<50ppb

<0.01ppb

Ethylene Oxide

<50ppb

<0.01ppb

HF

<10ppm

N/A

Isoprene

<1ppb

<0.01ppb

MEK

<50ppb

<0.01ppb

Methane

<50ppb

<0.01ppb

MIBK

<50ppb

<0.01ppb

Nox

<50ppb

<0.01ppb

Sox

<50ppb

<0.01ppb

Styrene

<5ppb

<0.01ppb

Toluene

<1ppb

<0.01ppb

Trike

<1ppb

<0.01ppb

Vinyl Acetate

<1ppb

<0.01ppb

Xylene

<1ppb

<0.01ppb

Brewing Gas Analysis

Gas Name

TD/MS Only

Acetone

<0.01ppb

Benzene

<0.01ppb

Carbonyl Sulphide

<0.01ppb

Cyclohexane

<0.01ppb

DMS

<0.01ppb

Freons

<0.01ppb

MEK

<0.01ppb

Methanol

<0.01ppb

MIBK

<0.01ppb

Toluene

<0.01ppb

Xylene

<0.01ppb

Aerospace & Defense

Gas Name

Capillary Inlet

Chlorine

<1ppm

CO

<1ppm

CO2

<1ppm

HF

<1ppm

Krypton

<2ppb

Methylene Chloride

<1ppm

Nox

<1ppm

Sox

<1ppm

Xenon

<2ppb

Leak Detection Gas Types:

Gas Name

Capillary Inlet

Freon

<0.01g/Yr

Helium

<0.01g/Yr

Krypton

<0.01g/Yr

Xenon

<0.01g/Yr

Visit the excellent NIST chemistry web book for more MS Spectral data

                                                                               

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In order to take full advantage of the very high speed acquisition available with MS based analysers, it is normal to run in one of two fast acquisition modes:

Survey Mode:

This mode utilises the full dynamic range of the detector ( 100% to <1ppb) and the entire Mass Range to give a "catch all" analysis of a process. Ideal for detection, identification and quantification of compounds which are likely to be produced by a process. In Air Quality applications, this mode is often used to identify the cause of a "bad smell", where information on the nature or source of the emission is difficult to obtain.

The "histogram" scans produced in survey mode can be compared to the instrument library or with a large data-base such as the NIST Chemistry Webbook in order to identify components.

Abundance data can be obtained by comparison of individual peaks with the Total ion Current (TIC) for the scan.

Data may be replayed as a trend against time in order to identify time critical events or emissions.

Ion V Time mode:

This mode really illustrates the speed advantage of MS over other analyzers. Up to 64 individual masses can be trended with real time to give a direct, real time trend and reading of concentration.

This mode is used to track signals in processes where the monitored components are known. The user enters mass numbers for each of the components and a colour trend is enabled for each one. Ideal for monitoring processes which vary rapidly with time. This mode is particularly suitable for Gas Phase Control, Thermal Decompositions, Catalytic Reactions, End Point Detection, Air Quality Monitoring and Filter Breakthrough processes. 

 

 

                         

Ultra Stable                                       Ultra Low Levels

High Stability Low Detection Limits:

MS not only offers high speed detection but combines it with very high stability and low drift with time.

The examples above illustrate low level detection at 10ppb and long term stability over a 12 hour period. The trend for Hydrogen and Carbon Monoxide shows stability to a standard relative deviation of just 0.0007. and a max / min variation across the run of just 0.25% of signal.